12/11/2023
In addition to vacuum pumps, leak detectors, measurement and analysis devices, components as well as vacuum chambers and systems, Pfeiffer Vacuum now also offers customized turn-key solutions in form of residual gas analysis systems. Fast-emerging markets with advancing technical requirements place an increasing value on superior cleanliness, as molecular contamination negatively affects the functionality of manufactured products. Therefore, more and more customers are defining higher requirements for cleanliness. For instance, in the EUV lithography market they are driven by the Generic Standards GSA 07 1221 & GSA 07 2221. Essential to securing the quality of parts is to properly determine the outgassing rates under a high vacuum environment by utilizing Pfeiffer Vacuum’s new OmniGrade system.
Pfeiffer Vacuum offers a new customized RGA system for sophisticated cleanliness verification.
OmniGrade is a sophisticated residual gas analysis (RGA) system. Its design is selected to meet specific testing demands. A team of Pfeiffer Vacuum experts is dedicated to delivering the best solution to meet customer requirements, considering total cost of ownership and lead times. OmniGrade configurations include two or three chambers consisting of the spectrometer chamber in which the mass spectrometer is positioned, and a measurement chamber where the samples are placed during measurement. Options include a load lock chamber to minimize system background and an automated sample transport system. The OmniGrade system was designed for low footprint demands and easy integration with the latest interfaces. Cleanroom compatibility is possible and the mass spectrometer according to the requirements (PrismaPro or HiQuad) can be selected. Thermal heating, either of the pure system or together with the sample (bake-out), will contribute to further optimizing the measuring capability and improving sample cleanliness.
“OmniGrade incorporates energy-efficient components and advanced technologies that help to optimize cleanliness verification processes, resulting in less waste and more efficient use of resources in the customer’s production environment”, said Patrick Walther, Strategic Product Manager Instruments at Pfeiffer Vacuum.
About Pfeiffer Vacuum
Pfeiffer Vacuum is one of the world’s leading providers of vacuum solutions. In addition to a full range of hybrid and magnetically levitated turbopumps, the product portfolio comprises backing pumps, leak detectors, measurement and analysis devices, vacuum components as well as vacuum chambers and systems. Ever since the invention of the turbopump by Pfeiffer Vacuum, the company has stood for innovative solutions and high-tech products in the analytical, industrial, research & development, semiconductor and future technologies markets. Founded in 1890, Pfeiffer Vacuum is active throughout the world today. The company employs a workforce of some 4,000 people and has more than 20 sales and service companies as well as 10 manufacturing sites worldwide. For more information, please visit www.pfeiffer-vacuum.com.
